WebHigh-aspect-ratio TSVs with thALD/PEALD tantalum-based barrier layer, thALD Ruthenium seed layer and subsequent copper electroplating: 27: Ta-rich atomic layer deposition TaN adhesion layer for Cu interconnects by means of plasma-enhanced atomic layer deposition: 28: Antireflection Coating on PMMA Substrates by Atomic Layer Deposition: 29 WebOct 2, 2024 · Efficient adhesion of gold thin films on dielectric or semiconductor substrates is essential in applications and research within plasmonics, metamaterials, 2D materials, and nanoelectronics. As a consequence of the relentless downscaling in nanoscience and technology, the thicknesses of adhesion layer and overlayer have reached tens of …
Vapor Deposition of Ruthenium from an Amidinate Precursor
WebJul 1, 2024 · A 0.3 nm thick titanium-based adhesion layer was deposited under Ru nano-interconnects. In addition, a standard Ru BEOL without airgaps and a standard Cu BEOL without airgaps but otherwise identical specifications with the Ru airgaps were processed and used for benchmarking used for mechanical benchmarking. WebIn particular, U.S. Pat. No. 6,462,367 discloses in one embodiment an adhesion layer for adhering ruthenium to a dielectric, the adhesion layer comprising RuSi x O y, where “x” and “y”... escs invalsi
PEALD of a Ruthenium Adhesion Layer for Copper …
WebJun 1, 2006 · Ruthenium, a transition metal belonging to the same group of platinum, 1 is used nowadays in many different industrial applications: decorative and corrosion … WebMay 25, 2024 · Herein, three strategies to enhance the adhesion of ruthenium films deposited on AISI 304 L by radio frequency (RF) magnetron sputtering, are investigated. … WebApr 16, 2003 · Treating the dielectric layer with silane prior to forming the ruthenium metal layer has been found to provide enhanced adhesion between the ruthenium metal layer and the dielectric layer without adding an additional adhesion layer between the dielectric and ruthenium layers. While treating silicon dioxide with silane may be preferred, it is ... finisher tee